Resolution Targets
Resolution targets serve as quality control and
machine performance verification devices.

Microworks offers two standard kinds, as described
in the Spec Sheet below.
Contact Us
Standard
Custom
Standard Yxlon Targets
Parameter
Information
Outer Dimensions
8 mm x 8 mm chip size
Materials
Substrate: 200 µm thick silicon
Absorber: 3 µm high gold
Line/Space Widths
Tolerance: +/- 10%
Pattern Line Widths [µm]
5.0, 4.0, 3.2, 2.5, 2.0, 1.6, 1.3, 1.0, 0.9, 0.8, 0.7, 0.6, 0.5, 0.45, 0.4, 0.35, 0.3 (17 steps)
Standard NanoXSpot Targets
Parameter
Information
Outer Dimensions
10 mm x 10 mm chip size
Holder with saphire glass cover: 40 mm x 30 mm x 5 mm
Materials
Substrate: 200 µm thick silicon
Absorber: 8 µm high gold
Line/Space Widths
Tolerance: +/- 15%
Pattern Line Widths [µm]
4 quadrants of 4 mm x 4 mm each; 2 modified Siemens stars featuring circular holes and 5 parallel gold lines, with line and space widths of 12 µm, 10 µm, 8 µm, 6 µm, 5 µm, 4 µm, and 3 µm at different angles. Smallest line width: 3 µm. Smallest hole diameter: 5 µm
Custom Resolution Targets:

We offer custom resolution targets made to your specifications.
Options include particular layouts, absorber heights, device sizes, and critical dimensions.

Contact Us
Explore Our Other Products
Explore Our Other Products