10 mm x 10 mm chip size Holder with saphire glass cover: 40 mm x 30 mm x 5 mm
Substrate: 200 µm thick silicon Absorber: 8 µm high gold
Tolerance: +/- 15%
Pattern Line Widths [µm]
4 quadrants of 4 mm x 4 mm each; 2 modified Siemens stars featuring circular holes and 5 parallel gold lines, with line and space widths of 12 µm, 10 µm, 8 µm, 6 µm, 5 µm, 4 µm, and 3 µm at different angles. Smallest line width: 3 µm. Smallest hole diameter: 5 µm
Custom Resolution Targets:
We offer custom resolution targets made to your specifications. Options include particular layouts, absorber heights, device sizes, and critical dimensions.